Development of pinhole-free amorphous aluminum oxide protective layers for biomedical device applications
نویسندگان
چکیده
منابع مشابه
Development of Pinhole-Free Amorphous Aluminum Oxide Protective Layers for Biomedical Device Applications.
This paper describes synthesis of ultrathin pinhole-free insulating aluminum oxide layers for electronic device protection in corrosive liquid environments, such as phosphate buffered saline (PBS) or clinical fluids, to enable emerging biomedical applications such as biomolecular sensors. A pinhole-free 25-nm thick amorphous aluminum oxide layer has been achieved using ultra-high vacuum DC magn...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2013
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2013.03.006